高纯AZO靶材/粉体 磁控溅射真空镀膜材料 4~6N可定制

AZO靶材 AZO Target

产品说明Product description

AZO靶材是锌铝氧化物功能陶瓷材料，主要应用于磁控溅射制备AZO透明导电薄膜。采用粉末冶金，烧结工艺，多个靶管拼接贴合为AZO靶材成品。

AZO target is a functional zinc aluminum oxide ceramic material, which is used for deposition of AZO transparent conductive thin films with magnetron sputtering. It is produced by suing power metallurgy and sintering process, in the form of tube/planar segments that are bonded into AZO target.

AZO旋转靶/平面靶 Rotary/ Planar AZO target 组分Chemical composition (wt%)Al2O3:ZnO = 2:98纯度 Purity (%)≥99.95密度 Density (g/cm3)≥5.56相对密度 Relative density (%)≥99.3绑定贴合率 Adhering ratio (%)≥98 %靶材尺寸 Dimension

-靶材外径(Target outer diameter）∅151-160 mm

-钢管直径(Stainless steel tube diameters) OD 133 mm/ID 125 mm

-长度（Length）≤4 m

-按图纸要求加工(According to customized drawings)

应用领域Applications

-薄膜太阳能电池Thin film solar cells

-Low-E镀膜玻璃Low-E glasses

-汽车镀膜玻璃Automotive glasses

产品特点Product features

-密度高，成膜质量好。

High-density target leading to high quality films

-使用功率高，为13 kM/m。

Sputtering power of as high as 13 kW/m.

-溅射速率、使用效率比同类产品高。

Sputtering rate and utilization efficiency that are high than the products of competito rs