供应日本yamato Low Temperature Asher

本公司供应日本yamato Low Temperature Asher-低温等离子灰化仪，品质保证，欢迎洽谈。

Low Temperature Asher PR300/301 Model 300 301 Method Barrel type of DP DP : direct plasma High-frequency Output Max.300W Oscillating Frequency 13.56MHz Reaction Chamber ø64×160mm 3 chambers ø118×160mm 1 chamber The PR 300 is a gas plasma device that is used widely for such applications as production of semiconductors and analysis work. It boasts outstanding operabi lity and safety, with an automatictuning system as a standard component and other features. It has a compact design, with a small-size HF generator and an oscillation section integrated with a portion of the chamber, allowingit to be installed into a 19-inch rack. Three 64mm diameter chambers are included. (PR300) The unit can be set for a wide range of output conditions to handle a variety of testing samples. One 118mm diameter large chamber is accommodated. PR301 The gas plasma equipment has a wide range of applications from ashing, etching, dry cleaning, etc. Reaction Chamber Control Panel Operation Flowchart Piping System Diagram (PR300) 日本yamato Low Temperature Asher-低温等离子灰化仪 Specifications Model PR300 PR301 Method Barrel type of direct plasma Control part High frequency output Max. 300W (100W×3 chambers for PR300) Oscillating frequency 13.56 MHz Output impedance 50Ω Tuning method Manual biaxial tuning method Instrument Output watt meter (0 to 300W) Reflected wave watt meter (0 to 100W) Vacuum gauge, bourdon's tube type Flow meter, needle valve integrated type, 1 set Timer 0.1sec. to 999h Gas inlet 1/4" stainless steel Power source (50/60Hz) AC 100/220V, single phase, 1 kVA Reaction part Reaction chamber Made of pyrex glass, ø64×160mm×3 chambers Made of pyrex glass, ø118×160mm x 1 chamber Electrode structure Condenser type, 2-way split Control system Auto pressure reduction, auto leak valve Piping material Stainless steel, Teflon, Copper and Brass Stainless steel, Teflon External dimensions(W×D×Hmm) 438×520×556 438×520×630 Weight Approx. 38kg Approx. 34kg Standard Accessories Vacuum grease :1 pc O-ring for reaction chamber :6 pcs.(for PR300) , 1pc. (for PR301) Sample dish (large and small) :each 1 set (for PR300 only) Optional Accessories Vacuum Pump Vacuum Hose Rubber Tube Adapter Center Ring Clamp