KLA 2138 KLA-Tencor 2138

'KLA 2138

Configuration and Description:

Brightfield Inspection

Currently configured for 6” to 8” wafers

Cassette Interface:

? (2x) Open Cassette

Chuck Type: Standard

Segmented Auto Threshold (SAT)

3.5” Floppy Drive

Standard Network Comm

10 BaseT / BNC Network Comm

Power Requirements (IS Module): V 208, A 10, 3-Phase , Freq 50 / 60 Hz

Power Requirements (UI Module): V 208, A 30, 3-Phase , Freq 50 / 60 Hz

Includes:

? Line Conditioner

? Fan Module

- Model: 2138 Surface Inspection System

- Wafer Size: Currently Configured for 8”/200mm Wafers

- Wafer Chuck: 200mm Low Contact Type

- Wafer Handling Autoloader

- Single Pentium Processor

- KLA-Tencor Software Version 5.1.060

- Array Mode Pixel: 0.25, 0.39, 0.62, 1.25

- Random Mode Pixel: 0.25, 0.39, 0.62, (1.25 um TBD)

- 400 MPS Image Computer

- Random & Array Mode Inspection

- 2 Standard Cassette Plates

- ADC Option

- SAT Option (Segmented Auto Threshold)

- Full Compatibility with KLA-Tencor Klarity Software via Directlink

- SECS Compliant

- XE (Xenon) Ultra Broadband Light Source

- Blower Box included

- CE Compliant Line Conditioner

- Power: 208V, 3PH, 50/60Hz

- Operations Manual & Documentation

- Refurbished to Meet Factory Specifications by KLA-Tencor Factory Trained Technician

KLA 2138

Configuration and Description:

Brightfield Inspection

Currently configured for 6” to 8” wafers

Cassette Interface:

? (2x) Open Cassette

Chuck Type: Standard

Segmented Auto Threshold (SAT)

3.5” Floppy Drive

Standard Network Comm

10 BaseT / BNC Network Comm

Power Requirements (IS Module): V 208, A 10, 3-Phase , Freq 50 / 60 Hz

Power Requirements (UI Module): V 208, A 30, 3-Phase , Freq 50 / 60 Hz

Includes:

? Line Conditioner

? Fan Module

- Model: 2138 Surface Inspection System

- Wafer Size: Currently Configured for 8”/200mm Wafers

- Wafer Chuck: 200mm Low Contact Type

- Wafer Handling Autoloader

- Single Pentium Processor

- KLA-Tencor Software Version 5.1.060

- Array Mode Pixel: 0.25, 0.39, 0.62, 1.25

- Random Mode Pixel: 0.25, 0.39, 0.62, (1.25 um TBD)

- 400 MPS Image Computer

- Random & Array Mode Inspection

- 2 Standard Cassette Plates

- ADC Option

- SAT Option (Segmented Auto Threshold)

- Full Compatibility with KLA-Tencor Klarity Software via Directlink

- SECS Compliant

- XE (Xenon) Ultra Broadband Light Source

- Blower Box included

- CE Compliant Line Conditioner

- Power: 208V, 3PH, 50/60Hz

- Operations Manual & Documentation

- Refurbished to Meet Factory Specifications by KLA-Tencor Factory Trained Technician

'