EXITECH M9000M9000准分

1、设备名称： EXITECH M9000

2、设备品牌：英国EXITECH

3、设备功能： 准分子激光微加工系统

4、设备应用： •太阳能电池及面板划线

•硅片钻切割

•连接器

•显示设备层图案 5、使用材料：

•硅

•陶瓷

•薄膜

•钻石

•光学材料

6、设备英文介绍：

The M9000 is designed for the high accuracy and high speed drilling, scribing, and pattering of a wide variety of materials for numerous precision applications.

The special architecture of the M9000 can incorporate two high repetition rate lasers for great flexibility in micromachining of samples with multiple layers。The M9000 has been specially developed to meet the exacting requirements of multi-shift production using high accuracy stages and high resolution optics. The integration of specially developed state-of-the-art calibration systems and diagnostics give unprecedented levels of precision, automated operation and reliability

With robotic loading/unloading options, automatic substrate alignment and turn-key operation, the M9000 is a robust production tool designed and manufactured for challenging industrial environments.

The M9000 is particularly suited for the precision of high aspect ratio microhholes. Techniques such as helical trepanning or percussion drilling can be used for the controlled production of high resolution features.

Materials:

• Silicon

• Ceramics

• Thin Films

• Diamond

• Optical Materials

Main Features:

• Options for solid-state & carbon dioxide lasers

• Customised optics and beam delivery

• Special "beam dither" function for controlled drilling

• Adjustment of beam focus during drilling

• 400mm(X) and400mm(Y) travel sample stages with 0.5µm resolution and500mm/sec speed

• Option for up to1mx1mstage travel at speeds up to1.5m/sec

• 30mm(Z) elevator stage with 1µm resolution

• Controlled gas assist and integrated nozzle

• Specially-designed precision chuck

• In-chuck beam profiler to monitor beam focus

• Automatic calibration of XY stages

• CCD camera viewing of sample

• Automatic alignment option using CCD camera

• Option for non-contact sample height detector

• In-built laser power meter for automated setting of processing power level

• Clean room compatible

• Specially-developed Exitech control software

• Class 1 laser-safe tool